• 文献标题:   Large area suspended graphene for nano-mechanical devices
  • 文献类型:   Article
  • 作  者:   HALLAM T, MOLDOVAN CF, GAJEWSKI K, IONESCU AM, DUESBERG GS
  • 作者关键词:   chemical vapour deposition, nanoelectromechanical system, suspended graphene, transfer printing
  • 出版物名称:   PHYSICA STATUS SOLIDI BBASIC SOLID STATE PHYSICS
  • ISSN:   0370-1972 EI 1521-3951
  • 通讯作者地址:   Univ Dublin Trinity Coll
  • 被引频次:   9
  • DOI:   10.1002/pssb.201552269
  • 出版年:   2015

▎ 摘  要

To address the need for large area dry graphene transfer techniques in Nanomechanical applications we use transfer printing to suspend large areas of graphene on pre-patterned substrates with cavities. We find that using this method, clean suspended graphene can be produced with areas up to 15 x 15 mu m(2). (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim