• 文献标题:   Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes
  • 文献类型:   Article
  • 作  者:   SMITH AD, NIKLAUS F, PAUSSA A, VAZIRI S, FISCHER AC, STERNER M, FORSBERG F, DELIN A, ESSENI D, PALESTRI P, OSTLING M, LEMME MC
  • 作者关键词:   graphene, pressure sensor, piezoresistive effect, nanoelectromechanical systems nems, mems
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   KTH Royal Inst Technol
  • 被引频次:   181
  • DOI:   10.1021/nl401352k
  • 出版年:   2013

▎ 摘  要

Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nanoelectromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nanoelectromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previously reported gauge factors and simulation values. The membrane in our experiment acts as a strain gauge independent of crystallographic orientation and allows for aggressive size scalability. When compared with conventional pressure sensors, the sensors have orders of magnitude higher sensitivity per unit area.