• 文献标题:   Nanosphere Lithography for the Fabrication of Ultranarrow Graphene Nanoribbons and On- Chip Bandgap Tuning of Graphene
  • 文献类型:   Article
  • 作  者:   LIU L, ZHANG YL, WANG WL, GU CZ, BAI XD, WANG EG
  • 作者关键词:  
  • 出版物名称:   ADVANCED MATERIALS
  • ISSN:   0935-9648 EI 1521-4095
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   98
  • DOI:   10.1002/adma.201003847
  • 出版年:   2011

▎ 摘  要

An innovative approach for the high-throughput, rapid, and low-cost fabrication of ultranarrow graphene nanoribbons (GNRs) using nanosphere lithography (NSL) nanopatterning in combination with low-power O-2 plasma etching is presented. The intrinsic simplicity of NSL patterning enables this fabrication approach to be applicable for the straightforward on-chip fabrication of GNRs and bandgap tuning of graphene.