• 文献标题:   Graphene as a Massless Electrode for Ultrahigh-Frequency Piezoelectric Nanoelectromechanical Systems
  • 文献类型:   Article
  • 作  者:   QIAN ZY, LIU FZ, HUI Y, KAR S, RINALDI M
  • 作者关键词:   graphene, massless electrode, nems, aluminum nitride, piezoelectric
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   Northeastern Univ
  • 被引频次:   20
  • DOI:   10.1021/acs.nanolett.5b01208
  • 出版年:   2015

▎ 摘  要

Designing "ideal electrodes" that simultaneously guarantee low mechanical damping and electrical loss as well as high electromechanical coupling in ultralow-volume piezoelectric nanomechanical structures can be considered to be a key challenge in the NEMS field. We show that mechanically transferred graphene, floating at van der Waals proximity, closely mimics "ideal electrodes" for ultrahigh frequency (0.2 GHz < f(0) < 2.6 GHz) piezoelectric nanoelectromechanical resonators with negligible mechanical mass and interfacial strain and perfect radio frequency electric field confinement. These unique attributes enable graphene-electrode-based piezoelectric nanoelectromechanical resonators to operate at their theoretically "unloaded" frequency-limits with significantly improved electromechanical performance compared to metal-electrode counterparts, despite their reduced volumes. This represents a spectacular trend inversion in the scaling of piezoelectric electromechanical resonators, opening up new possibilities for the implementation of nanoelectromechanical systems with unprecedented performance.