▎ 摘　　要

Atomically thin two-dimensional (2D) materials are excellent candidates for utilization as a solid lubricant or additive at all length scales from macro-scale mechanical devices to micro/nano-electromechanical systems (MEMS/NEMS). In such applications, wear resistance of ultrathin 2D materials is critical for sustained lubrication performance. Here, we investigated the wear of fluorinated graphene (FG) nanosheets deposited on silicon surfaces using atomic force microscopy (AFM) and discovered that the wear resistance of FG improves as the FG thickness decreases from 4.2 to 0.8 nm (corresponding to seven layers to single layer) and the surface energy of the substrate underneath the FG nanosheets increases. On the basis of density function theory (DFT) calculations, the negative correlation of wear resistance to FG thickness and the positive correlation to substrate surface energy could be explained with the degree of interfacial charge transfer between FG and substrate which affects the strength of FG adhesion to the substrate.