▎ 摘　　要

Suspended few-layer graphene beam electro-mechanical switches (SGSs) with 0.15 mu m air-gap are fabricated and electrically characterized. The SGS shows an abrupt on/off current characteristics with minimal off current. In conjunction with the narrow air-gap, the outstanding mechanical properties of graphene enable the mechanical switch to operate at a very low pull-in voltage (V-PI) of 1.85 V, which is compatible with conventional complimentary metal-oxide-semiconductor (CMOS) circuit requirements. In addition, we show that the pull-in voltage exhibits an inverse dependence on the beam length. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3610571]