▎ 摘　　要

Hydrogen intercalation is widely used to weaken graphene-substrate interactions and as a result enhancing graphene's electronic properties. This paper presents the study of microstructure of hydrogen intercalated graphene grown on Ge(0 0 1)/Si(0 0 1) substrate using Low-Voltage Scanning Electron Microscopy. The findings reveal a significant change in the surface morphology of germanium substrate: faceting structure disappears almost completely, the germanium surface flattens, and steps/terraces are formed. This leads to degradation of graphene's electronic properties, which shows the negative impact of hydrogen intercalation when graphene is grown on the germanium substrate. (C) 2018 Elsevier B.V. All rights reserved.