• 文献标题:   High-Resolution Laser-Induced Graphene from Photoresist
  • 文献类型:   Article
  • 作  者:   BECKHAM JL, LI JT, STANFORD MG, CHEN WY, MCHUGH EA, ADVINCULA PA, WYSS KM, CHYAN YE, BOLDMAN WL, RACK PD, TOUR JM
  • 作者关键词:   laserinduced graphene, thin film, high resolution, direct write, photoresist
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851 EI 1936-086X
  • 通讯作者地址:  
  • 被引频次:   31
  • DOI:   10.1021/acsnano.1c01843 EA APR 2021
  • 出版年:   2021

▎ 摘  要

The fabrication of patterned graphene electronics at high resolution is an important challenge for many applications in microelectronics. Here, we demonstrate the conversion of positive photoresist (PR), commonly employed in the commercial manufacture of consumer electronics, into laser-induced graphene (LIG). Sequential lasing converts the PR photopolymer first into amorphous carbon, then to photoresist-derived LIG (PR-LIG). The resulting material possesses good conductivity and is easily doped with metal or other additives for additional functionality. Furthermore, photolithographic exposure of PR prior to lasing enables the generation of PR-LIG patterns small enough to be invisible to the naked eye. By exploiting PR as a photopatternable LIG precursor, PR-LIG can be synthesized with a spatial resolution of similar to 10 mu m, up to 15 times smaller than conventional LIG patterning methods. The patterning of these small PR-LIG features could offer a powerful and broadly accessible strategy for the fabrication of microscale LIG-derived nanocomposites for on-chip devices.