• 文献标题:   Heteroepitaxial growth of wafer scale highly oriented graphene using inductively coupled plasma chemical vapor deposition
  • 文献类型:   Article
  • 作  者:   GAO LB, XU H, LI LJ, YANG Y, FU Q, BAO XH, LOH KP
  • 作者关键词:   graphene, heteroepitaxial, cvd, grain boundary, nanocrystal
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Nanjing Univ
  • 被引频次:   8
  • DOI:   10.1088/2053-1583/3/2/021001
  • 出版年:   2016

▎ 摘  要

The chemical vapor deposition (CVD) of graphene on Cu has attracted much attention because of its industrial scalability. Herein, we report inductively coupled plasma-assisted CVD of epitaxially grown graphene on (111)-textured Cu film alloyed with a small amount of Ni, where large area high quality graphene film can be grown in less than 5 min at 800 degrees C, thus affording industrial scalability. The epitaxially grown graphene films on (111)-textured Cu contain grains which are predominantly aligned with the Cu lattice and about 10% of 30 degrees-rotated grains (anti-grains). Such graphene films are exclusively monolayer and possess good electrical conductivity, high carrier mobility, and room temperature quantum Hall effect. Magnetoresistance measurements reveal that the reduction of the grain sizes from 150 nmto 50 nm produce increasing Anderson localization and the appearance of a transport gap. Owing to the presence of grain boundaries in these anti-grains, epitaxially grown graphene films possess n-type characteristics and exhibit ultra-high sensitivity to adsorbates.