• 文献标题:   Etching-Controlled Growth of Graphene by Chemical Vapor Deposition
  • 文献类型:   Article
  • 作  者:   LUO BR, GAO EL, GENG DC, WANG HP, XU ZP, YU G
  • 作者关键词:  
  • 出版物名称:   CHEMISTRY OF MATERIALS
  • ISSN:   0897-4756 EI 1520-5002
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   20
  • DOI:   10.1021/acs.chemmater.6b03672
  • 出版年:   2017

▎ 摘  要

Graphene growth and etching are reciprocal processes that can reach a dynamic balance during chemical vapor deposition (CVD). Most commonly, the growth of graphene is the dominate process, while the etching of graphene is a recessive process often neglected during CVD growth of graphene. We show here that through the rational design of low-pressure CVD of graphene in hydrogen diluted methane and regulation of the flow rate of H-2, the etching effect during the growth process of graphene could be prominent and even shows macroscopic selectivity. On this basis, etching-controlled growth and synthesis of graphene with various morphologies from compact to dendritic even to fragmentary have been demonstrated. The morphology selection mechanism is clarified through phase-field theory based on simulations. This study not only presents an intriguing case for the fundamental mechanism of CVD growth but also provides a facile method for the synthesis of high-quality graphene with trimmed morphologies.