• 文献标题:   Piezoelectric graphene field effect transistor pressure sensors for tactile sensing
  • 文献类型:   Article
  • 作  者:   YOGESWARAN N, NAVARAJ WT, GUPTA S, LIU F, VINCIGUERRA V, LORENZELLI L, DAHIYA R
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Univ Glasgow
  • 被引频次:   9
  • DOI:   10.1063/1.5030545
  • 出版年:   2018

▎ 摘  要

This paper presents graphene field-effect transistor (GFET) based pressure sensors for tactile sensing. The sensing device comprises GFET connected with a piezoelectric metal-insulator-metal (MIM) capacitor in an extended gate configuration. The application of pressure on MIM generates a piezo-potential which modulates the channel current of GFET. The fabricated pressure sensor was tested over a range of 23.54-94.18 kPa, and it exhibits a sensitivity of 4.55 x 10(-3) x kPa(-1). Further, the low voltage (similar to 100 mV) operation of the presented pressure sensors makes them ideal for wearable electronic applications. (C) 2018 Author(s).