▎ 摘　　要

Few works directly utilize monolayer or few-layer Graphene in energy storage because of the limited active materials. But it can be exploited in micro-power sources with low-rise power requirement, especially the microscale thin film lithium-ion batteries (MBs). Here a simple micro-fabrication process including one-step magnetron sputtering, is developed for fabricating the MBs with the ultrathin Graphene as anode. The footprint area of a single battery is similar to 1 mm(2) and the total thickness is similar to 600 nm. In the MBs, lithium cobalt oxide (LiCoO2) and lithium phosphorous oxynitride (LiPON) films are used as the cathode and electrolyte, respectively. This work provides guidance to manufacture high performance micro-power devices using advanced materials by a simple process. (C) 2016 Elsevier B.V. All rights reserved.