• 文献标题:   Peculiarities of graphene layer formation from amorphous carbon and silicon-carbon films
  • 文献类型:   Article
  • 作  者:   IL ICHEV EA, KIRILENKO EP, PETRUKHIN GN, RYCHKOV GS, SAKHAROV OA, KHAMDOKHOV EZ, CHERNYAVSKAYA ES, SHUPEGIN ML, SHCHEKIN AA
  • 作者关键词:  
  • 出版物名称:   TECHNICAL PHYSICS LETTERS
  • ISSN:   1063-7850 EI 1090-6533
  • 通讯作者地址:   Lukin State Res Inst Problems Phys
  • 被引频次:   2
  • DOI:   10.1134/S1063785014010234
  • 出版年:   2014

▎ 摘  要

Graphene layers on device structures have been formed from amorphous carbon and silicon-carbon films using a sequence of technological procedures, including thermodiffusion of carbon atoms, their accumulation at the heteroboundary between layers with significantly different diffusion coefficients, and subsequent phase transition from a carbon quasi-liquid to graphene layer.