• 文献标题:   Patterning of multilayer graphene on glass substrate by using ultraviolet picosecond laser pulses
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   CHANG TL, CHEN ZC, CHEN WY, HAN HC, TSENG SF
  • 作者关键词:   ultrafast laser, picosecond laser, laser ablation, multilayer graphene, thin film, patterning graphene
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Natl Taiwan Normal Univ
  • 被引频次:   6
  • DOI:   10.1016/j.mee.2016.01.012
  • 出版年:   2016

▎ 摘  要

This paper presents an approach that involves directly patterning multilayer graphene on a glass substrate by using ultraviolet picosecond (PS) laser irradiation. The PS laser is ultrafast, with a pulse duration of 15 ps, and can be operated at a wavelength of 355 nm. In this study, the multiple pulse ablation threshold fluence for patterning multilayer graphene was 5.2 J/cm(2), with a pulse repetition rate of 200 kHz and at a fixed scanning speed of 250 mm/s. The effect of laser parameters on the width, depth, and quality of patterning was explored. To investigate laser-nonablated and laser-ablated multilayer graphene, the characteristics of graphene thin film were measured using Raman, transmittance, and electrical analyses. The experimental results revealed that the PS laser is a promising and competitive tool for ablating multiple layers to several layers of graphene thin films and even for completely removing graphene thin-film layers. The PS laser technique can be useful in developing graphene-based devices. Moreover, this approach has the potential for industrial applications. (C) 2016 Published by Elsevier B.V.