▎ 摘　　要

Robust superlubrication across nano- and microscales is highly desirable at the interface with asperities of different sizes in durable micro/nanoelectromechanical systems under a harsh environment. A novel method to fabricate superlubric interfaces across nano- and microscales is developed by combining a batch of surface modification with atomically thin graphene. The robust superlubric interface across nano- and microscales between hydrophobic 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS) self-assembly monolayers (SAMs) and graphene was achieved under high relative humidity, sliding speed, and contact pressure. The superlubric mechanisms at the interface of FDTS/graphene could be attributed to the following at different scales: the hydrophobicity of FDTS SAMs and graphene preventing the capillary interaction of the interfacial friction under high relative humidity; the high elastic modulus of graphene leading to small interfacial contact area; the compressing and orientating of FDTS SAMs decreasing interfacial shear strength under high contact pressure; the surface modification of FDTS molecules reducing the interfacial potential barriers when sliding on the atomically thin graphene. The robust superlubric interface across nano- and microscales reducing the friction at the complicated interfaces with asperities at different scales and improving the performance and durability have great potentials in the field of micro/nano mechanical systems.