• 文献标题:   Nitrogen as a Suitable Replacement for Argon within Methane-Based Hot-Wall Graphene Chemical Vapor Deposition
  • 文献类型:   Article
  • 作  者:   GAUSDEN J, SIRIS R, STIMPELLINDNER T, MCEVOY N, DUESBERG GS, HALLAM T
  • 作者关键词:   chemical vapor deposition, graphene, nitrogen
  • 出版物名称:   PHYSICA STATUS SOLIDI BBASIC SOLID STATE PHYSICS
  • ISSN:   0370-1972 EI 1521-3951
  • 通讯作者地址:   Newcastle Univ
  • 被引频次:   1
  • DOI:   10.1002/pssb.201900240 EA AUG 2019
  • 出版年:   2019

▎ 摘  要

Of the gases frequently used during graphene chemical vapor deposition (CVD), argon plays no direct chemical role and therefore may be suitable for substitution with the cheaper alternative of nitrogen. The impact of using nitrogen as a carrier gas in methane-based hot-wall graphene CVD is investigated using Raman spectroscopy, X-ray photoelectron spectroscopy, and time-of-flight secondary ion mass spectroscopy. No increase in the nitrogen signal is observed within graphene grown within a nitrogen atmosphere within the detection limits of the spectroscopic techniques used.