▎ 摘 要
With the widespread application of wearable devices, the demand for high-performance sensors has increased dramatically. This study proposes a novel capacitive sensor. By using polystyrene (PS) microspheres and the sacrificial layer method, the ultrathin dielectric layer with surface micro-dome structure and uniform graphene doping are fabricated. In addition, the activated carbon non-woven fabrics (ACNWF) electrode was prepared, and the device characteristics of the sensor were investigated. The sensor has a good capacitive response in a wide pressure range (0-150 kPa) and a sensitivity of 0.209 kPa(-1) in the low-pressure range. The short response time (< 25 ms) is suitable for real-time dynamic monitoring. Meanwhile, the sensor has good stability (3500 cycles) and performs well in mouse double-click, muscle contraction and arm swing. This sensor has great potential in wearable electronics and human-computer interaction.