• 文献标题:   Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
  • 文献类型:   Article
  • 作  者:   SMITH AD, NIKLAUS F, PAUSSA A, SCHRODER S, FISCHER AC, STERNER M, WAGNER S, VAZIRI S, FORSBERG F, ESSENI D, OSTLING M, LEMME MC
  • 作者关键词:   graphene, nanoelectromechanical system, nems, mems, strain gauge, transducer, piezoresistive transduction, gauge factor, pressure transducer, suspended graphene membrane, uniaxial biaxial strain
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851 EI 1936-086X
  • 通讯作者地址:   KTH Royal Inst Technol
  • 被引频次:   41
  • DOI:   10.1021/acsnano.6b02533
  • 出版年:   2016

▎ 摘  要

Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene. Here, we report experimental and theoretical data on the uni- and biaxial piezoresistive properties of suspended graphene membranes applied to piezoresistive pressure sensors. A detailed model that utilizes a linearized Boltzman transport equation describes accurately the charge-carrier density and mobility in strained graphene and, hence, the gauge factor. The gauge factor is found to be practically independent of the doping concentration and crystallographic orientation of the graphene films. These investigations provide deeper insight into the piezoresistive behavior of graphene membranes.