• 文献标题:   Fabrication of high-performance graphene field-effect transistor with solution-processed Al2O3 sensing membrane
  • 文献类型:   Article
  • 作  者:   BAE TE, KIM H, JUNG J, CHO WJ
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Kwangwoon Univ
  • 被引频次:   7
  • DOI:   10.1063/1.4871865
  • 出版年:   2014

▎ 摘  要

High performance graphene field-effect transistors (FETs) with a solution-processed Al2O3 sensing membrane were fabricated. The solution-processed deposition technique offers a lot of advantages in terms of low cost, simplicity, high throughput, and large-area devices. Especially, the solution-deposition process is well-suited for membrane formation of graphene FETs, which is vulnerable to plasma or thermal processes for insulator growth on surface. The graphene FETs with a solution-deposited Al2O3 sensing membrane exhibited a higher pH sensitivity as well as good chemical stability. Therefore, the graphene FETs with solution-deposited Al2O3 sensing membrane are very promising to biological sensors application. (C) 2014 AIP Publishing LLC.