• 文献标题:   Anisotropic Etching of CVD Grown Graphene for Ammonia Sensing
  • 文献类型:   Article
  • 作  者:   YAGMURCUKARDES N, BAYRAM A, AYDIN H, YAGMURCUKARDES M, ACIKBAS Y, PEETERS FM, CELEBI C
  • 作者关键词:   graphene, sensor, etching, fluid flow, optical microscopy, microscopy, sensitivity, graphene, ammonia, qcm, hydrogen etching, anisotropic etching, gas sensor
  • 出版物名称:   IEEE SENSORS JOURNAL
  • ISSN:   1530-437X EI 1558-1748
  • 通讯作者地址:  
  • 被引频次:   2
  • DOI:   10.1109/JSEN.2022.3146220
  • 出版年:   2022

▎ 摘  要

Bare chemical vapor deposition (CVD) grown graphene (GRP) was anisotropically etched with various etching parameters. The morphological and structural characterizations were carried out by optical microscopy and the vibrational properties substrates were obtained by Raman spectroscopy. The ammonia adsorption and desorption behavior of graphene-based sensors were recorded via quartz crystal microbalance (QCM) measurements at room temperature. The etched samples for ambient NH3 exhibited nearly 35% improvement and showed high resistance to humidity molecules when compared to bare graphene. Besides exhibiting promising sensitivity to NH3 molecules, the etched graphene-based sensors were less affected by humidity. The experimental results were collaborated by Density Functional Theory (DFT) calculations and it was shown that while water molecules fragmented into H and O, NH3 interacts weakly with EGPR2 sample which reveals the enhanced sensing ability of EGPR2. Apparently, it would be more suitable to use EGRP2 in sensing applications due to its sensitivity to NH3 molecules, its stability, and its resistance to H2O molecules in humid ambient.