▎ 摘　　要

We demonstrate a comparative study on graphene growth mechanism using various catalytic metal substrates such as Ni thin films, Ni-deposited Mo (Ni/Mo) sheets, and Pt sheets during chemical vapor deposition (CVD). Depending on the substrates, two kinds of graphene growth mechanisms that involve either precipitation or surface adsorption of carbon have been reported. We synthesized graphene, focusing especially on the initial growth stage during CVD, by varying synthesis parameters such as synthesis time, amount of feedstock, and cooling rate after synthesis. We concluded that precipitation-driven synthesis is dominant in the case of Ni substrates whereas adsorption-driven growth is dominant in the Ni/Mo system. In the case of the Pt substrate, which is generally believed to grow by carbon precipitation, graphene growth by adsorption was found to be dominant. We believe that our results will contribute to a clearer understanding of the graphene synthesis mechanism, and development of manufacturing routes for controllable synthesis of high-quality graphenes.