• 文献标题:   Dual-gated BN-sandwiched multilayer graphene field-effect transistor fabricated by stamping transfer method and self-aligned contact
  • 文献类型:   Article
  • 作  者:   PARK J, KANG H, CHUNG D, KIM J, KIM JG, YUN Y, LEE YH, SUH D
  • 作者关键词:   graphene fieldeffect transistor, selfaligned contact, stamping transfer method
  • 出版物名称:   CURRENT APPLIED PHYSICS
  • ISSN:   1567-1739 EI 1878-1675
  • 通讯作者地址:   Sungkyunkwan Univ
  • 被引频次:   5
  • DOI:   10.1016/j.cap.2015.07.001
  • 出版年:   2015

▎ 摘  要

To fabricate a BN-sandwiched multilayer graphene field-effect transistor, we developed a self-aligned contact scheme in combination with optimized stamping processes for the stacking of two-dimensional (2D) materials. By using a self-aligned contact method during device fabrication, we can skip the dry-etch process which requires an exact etch-stop at the surface of the graphene layer and is not easy to control. In the structure of a dual-gate transistor, successful device operation at low temperature with and without magnetic fields proves that the self-alignment contact can be an effective tool for reliable device fabrication using 2D materials. (C) 2015 Elsevier B.V. All rights reserved.