• 文献标题:   Temperature dependence of carrier mobility in chemical vapor deposited graphene on high-pressure, high-temperature hexagonal boron nitride
  • 文献类型:   Article
  • 作  者:   OKIGAWA Y, MASUZAWA T, WATANABE K, TANIGUCHI T, YAMADA T
  • 作者关键词:   cvd graphene, hpht hbn, charged impurity, coulomb scattering, surface phonon scattering, mobility
  • 出版物名称:   APPLIED SURFACE SCIENCE
  • ISSN:   0169-4332 EI 1873-5584
  • 通讯作者地址:  
  • 被引频次:   3
  • DOI:   10.1016/j.apsusc.2021.150146 EA MAY 2021
  • 出版年:   2021

▎ 摘  要

The temperature dependence of the electrical properties of graphene grown by chemical vapor deposition (CVD) on high-pressure high-temperature (HPHT) hexagonal boron nitride (h-BN) was evaluated to understand the carrier scattering mechanism of CVD graphene. The effect of the thickness of HPTH h-BN on the carrier mobilities was also discussed. Carrier mobility was found to depend on HPHT h-BN thickness for the temperature range of 80-473 K. Coulomb scattering due to charged impurities present between HPHT h-BN and SiO2 was suppressed by increasing the HPHT h-BN thickness. The results did not confirm any temperature dependence of the carrier mobility of CVD graphene on HPHT h-BN (thickness = 6 and 11 nm). For CVD graphene on HPHT h-BN (thickness = 19 and 23 nm), the carrier mobility was limited by the phonon scattering of graphene for low temperatures and by surface phonon scattering of h-BN for high temperatures. Intrinsic graphene electrical properties were obtained using thicker HPHT h-BN.