• 文献标题:   Graphene Transistors on Mechanically Flexible Polyimide Incorporating Atomic-Layer-Deposited Gate Dielectric
  • 文献类型:   Article
  • 作  者:   NAYFEH OM
  • 作者关键词:   flexible, graphene, polyimide, transistor
  • 出版物名称:   IEEE ELECTRON DEVICE LETTERS
  • ISSN:   0741-3106
  • 通讯作者地址:   USA
  • 被引频次:   19
  • DOI:   10.1109/LED.2011.2163489
  • 出版年:   2011

▎ 摘  要

Transistors are constructed using chemical-vapor-deposited graphene on mechanically flexible polyimide and incorporate a low-temperature atomic-layer-deposited gate dielectric. Three-micrometer gate length transistors with V(ds) = 2.0 V have a drive current of > 0.3 A/mm with a transconductance of > 3 mS/mm. The peak hole and electron mobilities are 295 and 106 cm(2)/V . s, respectively. Subsequent to repeated flexing, the ambipolar characteristics and extremely low gate leakage remain intact with < 15% reduction in the peak carrier mobility. Good agreement is obtained between the measured mobility and a physically based empirical model and is consistent with the mobility limited by impurity levels and surface roughness. Using graphene-on-polyimide transistors, radio-frequency functionalities, including signal amplification and phase shifting, are demonstrated, and routes for performance improvement are discussed. The results are important for the development of graphene-based electronics on mechanically flexible substrates.