• 文献标题:   A graphene pH sensor fabrication process for a nanotechnology laboratory course
  • 文献类型:   Article
  • 作  者:   SUH Y, WEN CY, SHAH S, WATSON GP
  • 作者关键词:   device fabrication, educational laboratory, graphene
  • 出版物名称:   JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY
  • ISSN:   1071-0922 EI 1938-3657
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1002/jsid.1137 EA MAY 2022
  • 出版年:   2023

▎ 摘  要

A laboratory course experiment is described that combines traditional semiconductor fabrication techniques with the application of a nanotechnology-relevant material, graphene. Sensor devices made with graphene are integrated with a microfluidic device in order to introduce students to new applications of this technology in biology and medicine. The fabrication and test process for a pH sensor is used as a tangible example, exhibiting a changing resistance across graphene strips immersed in different pH buffer solutions. The processing and test equipment required is available in many Si device fabrication educational laboratories.