▎ 摘　　要

We present the results of the study of graphene nanoablation under mechanical stress of an ultrasharp (the rounding radius is 2 nm) tip of a scanning probe microscope (SPM)). It was found that the SPM probe contact with graphene results in average removal of 7 center dot 10(-3)-5 center dot 10(-2) nm of film per scan, i.e., only a few carbon atoms or clusters, in the impact area. The capability of this precision nanoablation process was shown in developing graphene nanoislands and nanoribbons 1 A mu m long and 10 nm wide.