• 文献标题:   Wafer-Scale Synthesis and Transfer of Graphene Films
  • 文献类型:   Article
  • 作  者:   LEE Y, BAE S, JANG H, JANG S, ZHU SE, SIM SH, SONG YI, HONG BH, AHN JH
  • 作者关键词:   graphene, transfer, field effect transistor, strain gauge, stretchable electronic
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   Sungkyunkwan Univ
  • 被引频次:   776
  • DOI:   10.1021/nl903272n
  • 出版年:   2010

▎ 摘  要

We developed means to produce wafer scale, high-quality graphene films as large as 3 in. wafer size on NI and Cu films under ambient pressure and transfer them onto arbitrary substrates through instantaneous etching of metal layers. we also demonstrated the applications of the large-area graphene films for the batch fabrication of held-effect transistor (FET) arrays and stretchable strain gauges showing extraordinary performances. Transistors showed the hole and electron mobilities of the device of 1100 +/- 70 and 550 +/- 50 cm(2)/(V s) at drain bias of -0.75 V, respectively. The piezo-resistance gauge factor of strain sensor was similar to 6.1. These methods represent a significant. step toward the realization of graphene devices in wafer scale as well as application in optoelectronics, flexible and stretchable electronics.