• 文献标题:   Determining the number of graphene layers based on Raman response of the SiC substrate
  • 文献类型:   Article
  • 作  者:   DOBROWOLSKI A, JAGIELLO J, CZOLAK D, CIUK T
  • 作者关键词:   graphene, cvd, epitaxy, sic, raman imaging, quality assessment
  • 出版物名称:   PHYSICA ELOWDIMENSIONAL SYSTEMS NANOSTRUCTURES
  • ISSN:   1386-9477 EI 1873-1759
  • 通讯作者地址:  
  • 被引频次:   7
  • DOI:   10.1016/j.physe.2021.114853 EA JUL 2021
  • 出版年:   2021

▎ 摘  要

In this report we demonstrate a method for direct determination of the number of layers of hydrogen-intercalated quasi-free-standing epitaxial Chemical Vapor Deposition graphene on semiinsulating vanadiumcompensated on-axis 6H-SiC(0001). The method anticipates that the intensity of the substrate's Raman-active longitudinal optical A(1) mode at 964 cm(-1) is attenuated by 2.3% each time the light passes through a single graphene layer. Normalized to its value in a graphene-free region, the A(1) mode relative intensity provides a greatly enhanced topographic image of graphene and points out to the number of its layers within the terraces and step edges, making the technique a reliable diagnostic tool for applied research.