• 文献标题:   Investigation of dielectric substrates on electrical and optical performance of wafer-scale graphene using non-contact methods
  • 文献类型:   Article
  • 作  者:   WANG D, NING J, ZHANG JC, GUO LX, HAO Y
  • 作者关键词:   waferscale graphene, dielectric substrate, noncontact
  • 出版物名称:   SEMICONDUCTOR SCIENCE TECHNOLOGY
  • ISSN:   0268-1242 EI 1361-6641
  • 通讯作者地址:   Xidian Univ
  • 被引频次:   0
  • DOI:   10.1088/1361-6641/aa832f
  • 出版年:   2017

▎ 摘  要

Here we systemically discussed the influence of dielectric substrates on the surface morphology, electrical and optical performance of transferred graphene. The electrical properties were investigated using a microwave-probing technique without metal-graphene contact. We found that a complex mechanism governed the influence of the surface properties of the dielectric substrates, such as morphology, hydrophilicity, crystallinity, and polarization, on the performance of the graphene. We also found that graphene on r-Al2O3 was more effective for graphene-based devices with a high carrier mobility of similar to 5000 cm(2) V-1 s(-1). This provides a new method to choose the most suitable substrate for fabricating graphene-based devices.