• 文献标题:   Transfer printing of CVD graphene FETs on patterned substrates
  • 文献类型:   Article
  • 作  者:   ABHILASH TS, DE ALBA R, ZHELEV N, CRAIGHEAD HG, PARPIA JM
  • 作者关键词:  
  • 出版物名称:   NANOSCALE
  • ISSN:   2040-3364 EI 2040-3372
  • 通讯作者地址:   Cornell Univ
  • 被引频次:   9
  • DOI:   10.1039/c5nr03501e
  • 出版年:   2015

▎ 摘  要

We describe a simple and scalable method for the transfer of CVD graphene for the fabrication of field effect transistors. This is a dry process that uses a modified RCA-cleaning step to improve the surface quality. In contrast to conventional fabrication routes where lithographic steps are performed after the transfer, here graphene is transferred to a pre-patterned substrate. The resulting FET devices display nearly zero Dirac voltage, and the contact resistance between the graphene and metal contacts is on the order of 910 +/- 340 Omega mu m. This approach enables formation of conducting graphene channel lengths up to one millimeter. The resist-free transfer process provides a clean graphene surface that is promising for use in high sensitivity graphene FET biosensors.