▎ 摘 要
Resonant mechanics of high quality factor (Q) graphene coated silicon nitride devices have been explored using optical and electrical transduction schemes. With the addition of the graphene layer, we retain the desirable mechanical properties of silicon nitride but utilize the electrical and optical properties of graphene to transduce and tune the resonant motion by both optical and electrical means. By positioning the graphene-on-silicon-nitride drums in a tunable optical cavity, we observe position dependent damping and resonant frequency control of the devices due to optical absorption by graphene. (C) 2013 AIP Publishing LLC.