• 文献标题:   Low-temperature growth and direct transfer of graphene-graphitic carbon films on flexible plastic substrates
  • 文献类型:   Article
  • 作  者:   KIM YJ, KIM SJ, JUNG MH, CHOI KY, BAE S, LEE SK, LEE Y, SHIN D, LEE B, SHIN H, CHOI M, PARK K, AHN JH, HONG BH
  • 作者关键词:  
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Seoul Natl Univ
  • 被引频次:   18
  • DOI:   10.1088/0957-4484/23/34/344016
  • 出版年:   2012

▎ 摘  要

We demonstrate low-temperature growth and direct transfer of graphene-graphitic carbon films (G-GC) onto plastic substrates without the use of supporting materials. In this approach, G-GC films were synthesized on copper layers by using inductively coupled plasma enhanced chemical vapor deposition, enabling the growth of few-layer graphene (G) on top of Cu and the additional growth of graphitic carbon (GC) films above the graphene layer at temperatures as low as 300 degrees C. The patterned G-GC films are not easily damaged or detached from the polymer substrates during the wet etching and transfer process because of the van der Waals forces and pi-pi interactions between the films and the substrates. Raman spectroscopy reveals the two-dimensional hexagonal lattice of carbon atoms and the crystallinity of the G-GC films. The optical transparency and sheet resistance of the G-GC films are controlled by modulating the film thickness. Strain sensors are successfully fabricated on plastic substrates, and their resistance modulation at different strains is investigated.