• 文献标题:   Suspended graphene devices with local gate control on an insulating substrate
  • 文献类型:   Article
  • 作  者:   ONG FR, CUI Z, YURTALAN MA, VOJVODIN C, PAPAJ M, ORGIAZZI JLFX, DENG CQ, BAL M, LUPASCU A
  • 作者关键词:   suspended graphene, fieldeffect transistor, 2d material
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Univ Innsbruck
  • 被引频次:   6
  • DOI:   10.1088/0957-4484/26/40/405201
  • 出版年:   2015

▎ 摘  要

We present a fabrication process for graphene-based devices where a graphene monolayer is suspended above a local metallic gate placed in a trench. As an example we detail the fabrication steps of a graphene field-effect transistor. The devices are built on a bare high-resistivity silicon substrate. At temperatures of 77 K and below, we observe the field-effect modulation of the graphene resistivity by a voltage applied to the gate. This fabrication approach enables new experiments involving graphene-based superconducting qubits and nano-electromechanical resonators. The method is applicable to other two-dimensional materials.