▎ 摘　　要

The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700 degrees C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene. (C) 2015 American Vacuum Society.