▎ 摘　　要

The problem of efficiency of using electrical properties for characterizing graphene structures obtained by chemical vapor deposition and formed on substrates of various materials (copper foil, glass, silicon, and Al2O3) is investigated. This study demonstrates the high sensitivity of the Kelvin-probe method as well as the methods of scanning capacitance and electrostatic microscopy to the number of graphene layers on the surface of substrates made of various materials.