• 文献标题:   Si-Based NIR Tunneling Heterojunction Photodetecor With Interfacial Engineering and 3D-Graphene Integration
  • 文献类型:   Article
  • 作  者:   HE ZY, ZHANG S, ZHENG L, LIU ZD, ZHANG GL, WU HJ, WANG BK, LIU ZY, JIN ZW, WANG G
  • 作者关键词:   3dgraphene, nir tunnelling photodetector, interfacial engineering
  • 出版物名称:   IEEE ELECTRON DEVICE LETTERS
  • ISSN:   0741-3106 EI 1558-0563
  • 通讯作者地址:  
  • 被引频次:   5
  • DOI:   10.1109/LED.2022.3203474
  • 出版年:   2022

▎ 摘  要

Here, we have fabricated high-performance near-infrared (NIR) tunnelling heterojunction photodetectors (THPDs) by in-situ synthesizing three-dimensional (3D) grapheneon Si with the insertion of a high-kappa tunnelling layer. Combining the high light-harvesting ability of 3D-graphene and the effective dark current suppression of the high-kappa tunnelling layer, the trade-off between the ultrafast response and ultra-sensitivity in graphene-based PDs is successfully bridged. Our device exhibits ultra-high responsivity (11.2 A/W), excellent specific detectivity (5.9 x10(10) Jones), and ultra-fast response(168 mu s) at the communication wavelength (1550 nm). This work provides a universal strategy to fabricate high-performance and low-cost graphene/silicon PDs in the communication wavelength.