• 文献标题:   Synthesize monolayer graphene on SiO2/Si substrate with copper-vapor-assisted CVD method
  • 文献类型:   Article
  • 作  者:   ZHANG WQ, ZHANG LC, ZHANG H, SONG LL, YE QX, CAI JM
  • 作者关键词:   graphene, copper vapor, sio2/si substrate, cvd
  • 出版物名称:   MATERIALS RESEARCH EXPRESS
  • ISSN:   2053-1591
  • 通讯作者地址:   Kunming Univ Sci Technol
  • 被引频次:   0
  • DOI:   10.1088/2053-1591/aae053
  • 出版年:   2018

▎ 摘  要

The growth of high quality graphene on an insulator substrate such as SiO2/Si broadens the way for the development of graphene-based electronic devices, which still remains significant attraction. Here, we present an approach to directly synthesize high quality single layer graphene (SLG) on SiO2 substrate with Cu-vapor-assisted chemical vapor deposition (CVD). Because Cu is in vapor state, not only it catalyzes the pyrolysis of hydrocarbon precursors and accelerates the nucleation, but also it won't remain on the graphene surface nor under the graphene. Different testing methods confirm that large scale, high quality of SLG is successfully synthesized. Furthermore, the graphene has good conductivity and transparency. Therefore, this method bares great potential in future electronic applications.