▎ 摘　　要

Sensitive and broadband infrared sensors are required for security and medical applications, as few can rapidly and sensitively detect infrared without uncooled devices. Here, we report a wideband optical-detection strategy based on the thermoelastic effect of a coating-enhanced quartz tuning fork (QTF) and study the feasibility of using an atomic force probe operating in contact mode to monitor the vibration. Graphene oxide (GO) and polydimethylsiloxane (PDMS) coating were applied on the QTF's surface to improve the light absorption and the thermal-mechanical conversion efficiency. Experimental results showed that the bi-layer coatings yielded a maximum gain factor of 8 in response amplitude and signal-to-noise ratio (SNR) than that of a bare QTF, respectively. Lasers with wavelengths of 1512 nm and 10.6 mu m were used as the typical representative light source to test the photoresponse of the QTF detector. The device displays a broadband photoresponse covering the near-infrared to mid-infrared range at room temperature, high performance with the maximum photoresponsivity of 85.76 V.mW(-1), and 1 sigma detection limit of 0.056 mu W; the lowest noise equivalent power (NEP) of 1.35 nW.Hz(-1/2) and 43.9 ms response speed is also achieved. The preparation process of detector is simple and easy to implement; the resulting device exhibits high responsivity and wide wavelength response ranging at least from 1512 to 10600 nm, compared with custom QTF; and the surface coating strategy potentially enables the construction of a new class of low-cost photodetection sensors operated at room temperature. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement