• 文献标题:   High-performance and wearable strain sensors based on graphene microfluidics and serpentine microchannels for human motion detection
  • 文献类型:   Article
  • 作  者:   LIU Y, HUANG JZ, DING GF, YANG ZQ
  • 作者关键词:  
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Shanghai Jiao Tong Univ
  • 被引频次:   0
  • DOI:   10.1016/j.mee.2020.111402
  • 出版年:   2020

▎ 摘  要

Inspired by microfluidics and microchannels, we demonstrate a new method based on graphene microfluidics and serpentine microchannels (GMSM) to fabricate and pattern graphene/polymer composite film for pressure and strain measurement. With several types of experiment paraments including concentration of graphene suspension, deposition frequency and width of microchannels, the resistance response of the sensors is measured as a function of mechanical stimulations. The pressure sensor exhibits the high sensitivity (maximum: 0.27 /MPa) with ultrawide range (0-3 MPa), fast response and recovery time (88 ms, 217 ms), good repeatability (250 cycles). For the strain sensor, high sensitivity (maximum: 60) with high deformation limits (75%), good repeatability (2000 cycles) have been achieved. Finally, some human bio-signals are measured, demonstrated that the sensors have good potential for human-motions detecting and health surveillance.