• 文献标题:   Atomic force microscope local oxidation nanolithography of graphene
  • 文献类型:   Article
  • 作  者:   WENG LS, ZHANG LY, CHEN YP, ROKHINSON LP
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   Purdue Univ
  • 被引频次:   145
  • DOI:   10.1063/1.2976429
  • 出版年:   2008

▎ 摘  要

We demonstrate the local oxidation nanopatterning of graphene films by an atomic force microscope. The technique provides a method to form insulating trenches in graphene flakes and to fabricate nanodevices with sub-nanometer precision. We demonstrate fabrication of a 25-nm-wide nanoribbon and submicron size nanoring from a graphene flake. We also found that we can write either trenches or bumps on the graphene surface depending on the lithography conditions. We attribute the bumps to partial oxidation of the surface and incorporation of oxygen into the graphene lattice. (C) 2008 American Institute of Physics.