• 文献标题:   Selective Growth of WSe2 with Graphene Contacts
  • 文献类型:   Article
  • 作  者:   LIN YT, ZHANG XQ, CHEN PH, CHI CC, LIN EC, RONG JG, OUYANG CH, CHEN YF, LEE YH
  • 作者关键词:   contact, wse2, electronic, heterostructure, interface
  • 出版物名称:   NANOSCALE RESEARCH LETTERS
  • ISSN:   1931-7573 EI 1556-276X
  • 通讯作者地址:   Natl Cent Univ
  • 被引频次:   0
  • DOI:   10.1186/s11671-020-3261-y
  • 出版年:   2020

▎ 摘  要

Nanoelectronics of two-dimensional (2D) materials and related applications are hindered with critical contact issues with the semiconducting monolayers. To solve these issues, a fundamental challenge is selective and controllable fabrication of p-type or ambipolar transistors with a low Schottky barrier. Most p-type transistors are demonstrated with tungsten selenides (WSe2) but a high growth temperature is required. Here, we utilize seeding promoter and low pressure CVD process to enhance sequential WSe2 growth with a reduced growth temperature of 800 degrees C for reduced compositional fluctuations and high hetero-interface quality. Growth behavior of the sequential WSe2 growth at the edge of patterned graphene is discussed. With optimized growth conditions, high-quality interface of the laterally stitched WSe2-graphene is achieved and characterized with transmission electron microscopy (TEM). Device fabrication and electronic performances of the laterally stitched WSe2-graphene are presented.