• 文献标题:   Epitaxial Growth of 6 in. Single-Crystalline Graphene on a Cu/Ni (111) Film at 750 degrees C via Chemical Vapor Deposition
  • 文献类型:   Article
  • 作  者:   ZHANG XF, WU TR, JIANG Q, WANG HS, ZHU HL, CHEN ZY, JIANG R, NIU TC, LI ZJ, ZHANG YW, QIU ZJ, YU GH, LI A, QIAO S, WANG H, YU QM, XIE XK
  • 作者关键词:   lowtemperature growth, singlecrystal cu/ni 111 film, singlecrystal graphene, ultraflat
  • 出版物名称:   SMALL
  • ISSN:   1613-6810 EI 1613-6829
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   17
  • DOI:   10.1002/smll.201805395
  • 出版年:   2019

▎ 摘  要

The future electronic application of graphene highly relies on the production of large-area high-quality single-crystal graphene. However, the growth of single-crystal graphene on different substrates via either single nucleation or seamless stitching is carried out at a temperature of 1000 degrees C or higher. The usage of this high temperature generates a variety of problems, including complexity of operation, higher contamination, metal evaporation, and wrinkles owing to the mismatch of thermal expansion coefficients between the substrate and graphene. Here, a new approach for the fabrication of ultraflat single-crystal graphene using Cu/Ni (111)/sapphire wafers at lower temperature is reported. It is found that the temperature of epitaxial growth of graphene using Cu/Ni (111) can be reduced to 750 degrees C, much lower than that of earlier reports on catalytic surfaces. Devices made of graphene grown at 750 degrees C have a carrier mobility up to approximate to 9700 cm(2) V-1 s(-1) at room temperature. This work shines light on a way toward a much lower temperature growth of high-quality graphene in single crystallinity, which could benefit future electronic applications.