• 文献标题:   Broad-Range Fast Response Vacuum Pressure Sensors Based on a Graphene Nanocomposite with Hollow alpha-Fe2O3 Microspheres
  • 文献类型:   Article
  • 作  者:   SHIRHATTI V, NUTHALAPATI S, KEDAMBAIMOOLE V, BHARDWAJ A, NAYAK MM, RAJANNA K
  • 作者关键词:   graphene, vacuum, pressure sensor, ferric oxide, nanocomposite
  • 出版物名称:   ACS APPLIED ELECTRONIC MATERIALS
  • ISSN:   2637-6113
  • 通讯作者地址:   Indian Inst Sci
  • 被引频次:   0
  • DOI:   10.1021/acsaelm.0c00387
  • 出版年:   2020

▎ 摘  要

This paper demonstrates the application of a graphene-ferric oxide (hollow mesoporous alpha-Fe2O3 microspheres) nanocomposite for the measurement of vacuum pressure. Numerous research and industrial systems essentially require a vacuum environment, and therefore, measurement of vacuum becomes vital for their efficient functioning. The presented graphene nanocomposite vacuum pressure sensor (GnVS) is fabricated using a reduced graphene oxide (rGO)/alpha-Fe2O3 nanocomposite synthesized by a facile and safe hydrothermal process. This sensor has an impressive operating range spanning 9 orders of magnitude down from atmospheric pressure (10(3) mbar) to high vacuum (similar to 4 x 10(-6) mbar), a remarkable sensitivity of 2 x 10(-4) mbar(-1), and a response/recovery time of similar to 3 s, which are major improvements over the reported graphene- and rGO-based vacuum sensors. The reason behind the exceptional device performance is proposed to be a coaction of gas chemisorption on sensor surface, thermal conductivity of the sensing material, and varying van der Waals force between rGO layers. The temperature dependence of the sensor has been examined, and an appropriate temperature compensation technique is suggested. GnVS promises to bring a one-step vacuum measurement solution with its high sensitivity, repeatability, broad range, simple cost-effective design, and potential to revolutionize the vacuum sensing technology.