▎ 摘　　要

The method of molecular dynamics has been used to study the bombardment of a copper film on supported graphene by Ar-13 clusters with kinetic energies of 5, 10, 20 and 30 eV and different angles of incidence. It is obtained that the cluster energy should be in the interval 20-30 eV for effective graphene cleaning. There is no cleaning effect at vertical incidence (theta = 0 degrees) of Ar-13 clusters. The bombardments at 45 degrees and 90 degrees incident angles are the most effective ones at a moderate and big amount of deposited copper respectively. (C) 2014 Elsevier B.V. All rights reserved.