• 文献标题:   Spray-On Liquid-Metal Electrodes for Graphene Field-Effect Transistors
  • 文献类型:   Article
  • 作  者:   MELCHER JL, ELASSY KS, ORDONEZ RC, HAYASHI C, OHTA AT, GARMIRE D
  • 作者关键词:   graphene, galinstan, liquidmetal, sprayon, aerosol, honey, mobility, contact resistance, tlm, iv characteristic
  • 出版物名称:   MICROMACHINES
  • ISSN:   2072-666X
  • 通讯作者地址:   Univ Hawaii Manoa
  • 被引频次:   6
  • DOI:   10.3390/mi10010054
  • 出版年:   2019

▎ 摘  要

Advancements in flexible circuit interconnects are critical for widespread adoption of flexible electronics. Non-toxic liquid-metals offer a viable solution for flexible electrodes due to deformability and low bulk resistivity. However, fabrication processes utilizing liquid-metals suffer from high complexity, low throughput, and significant production cost. Our team utilized an inexpensive spray-on stencil technique to deposit liquid-metal Galinstan electrodes in top-gated graphene field-effect transistors (GFETs). The electrode stencils were patterned using an automated vinyl cutter and positioned directly onto chemical vapor deposition (CVD) graphene transferred to polyethylene terephthalate (PET) substrates. Our spray-on method exhibited a throughput of 28 transistors in under five minutes on the same graphene sample, with a 96% yield for all devices down to a channel length of 50 m. The fabricated transistors possess hole and electron mobilities of 663.5 cm(2)/(Vs) and 689.9 cm(2)/(Vs), respectively, and support a simple and effective method of developing high-yield flexible electronics.