• 文献标题:   Embedded graphene for large-area silicon-based devices
  • 文献类型:   Article
  • 作  者:   GLUBA MA, AMKREUTZ D, TROPPENZ GV, RAPPICH J, NICKEL NH
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   Helmholtz Zentrum Berlin Mat Energie GmbH
  • 被引频次:   12
  • DOI:   10.1063/1.4818461
  • 出版年:   2013

▎ 摘  要

Macroscopic graphene films buried below amorphous and crystalline silicon capping layers are studied by Raman backscattering spectroscopy and Hall-effect measurements. The graphene films are grown by chemical vapor deposition on copper foil and transferred to glass substrates. Uncapped films possess charge-carrier mobilities of 2030 cm(2)/Vs at hole concentrations of 3.6 x 10(12) cm(-2). Graphene withstands the deposition and subsequent crystallization of silicon capping layers. However, the crystallinity of the silicon cap has large influence on the field-induced doping of graphene. Temperature dependent Hall-effect measurements reveal that the mobility of embedded graphene is limited by charged-impurity and phonon-assisted scattering. (C) 2013 AIP Publishing LLC.