• 文献标题:   Impact of contact and access resistances in graphene field-effect transistors on quartz substrates for radio frequency applications
  • 文献类型:   Article
  • 作  者:   RAMON ME, MOVVA HCP, CHOWDHURY SF, PARRISH KN, RAI A, MAGNUSON CW, RUOFF RS, AKINWANDE D, BANERJEE SK
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Univ Texas Austin
  • 被引频次:   0
  • DOI:   10.1063/1.4866332
  • 出版年:   2014

▎ 摘  要

High-frequency performance of graphene field-effect transistors (GFETs) has been limited largely by parasitic resistances, including contact resistance (R-C) and access resistance (R-A). Measurement of short-channel (500 nm) GFETs with short (200 nm) spin-on-doped source/drain access regions reveals negligible change in transit frequency (f(T)) after doping, as compared to similar to 23% f(T) improvement for similarly sized undoped GFETs measured at low temperature, underscoring the impact of R-C on high-frequency performance. DC measurements of undoped/doped short and long-channel GFETs highlight the increasing impact of R-A for larger GFETs. Additionally, parasitic capacitances were minimized by device fabrication using graphene transferred onto low-capacitance quartz substrates. (C) 2014 AIP Publishing LLC.