▎ 摘　　要

Electromechanical switch devices employing suspended graphene as movable elements have been developed. Their on and off states can be controlled by modulating the electrostatic force applied to the graphene. The devices exhibit on-off ratios of up to 10(4) and lifetimes of over 500 cycles. The prototype device demonstrates the feasibility of using multilayer graphene in electromechanical systems. Measurements of the mechanical properties of the free-standing monolayer graphene gave a value of 0.96 TPa for the Young's modulus and a van der Waals force with silicon oxide of 0.17 nN/nm(2).