• 文献标题:   Insulating SiO2 under Centimeter-Scale, Single-Crystal Graphene Enables Electronic-Device Fabrication
  • 文献类型:   Article
  • 作  者:   GUO H, WANG XY, HUANG L, JIN X, YANG ZZ, ZHOU Z, HU H, ZHANG YY, LU HL, ZHANG QH, SHEN CM, LIN X, GU L, DAI Q, BAO LH, DU SX, HOFER W, PANTELIDES ST, GAO HJ
  • 作者关键词:   graphene, centimeterscale, insulating sio2, intercalation, in situ device fabrication
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   0
  • DOI:   10.1021/acs.nanolett.0c03254
  • 出版年:   2020

▎ 摘  要

Graphene on SiO2 enables fabrication of Si-technology-compatible devices, but a transfer of these devices from other substrates and direct growth have severe limitations due to a relatively small grain size or device-contamination. Here, we show an efficient, transfer-free way to integrate centimeter-scale, single-crystal graphene, of a quality suitable for electronic devices, on an insulating SiO2 film. Starting with single-crystal graphene grown epitaxially on Ru(0001), a SiO2 film is grown under the graphene by stepwise intercalation of silicon and oxygen. Thin (similar to 1 nm) crystalline or thicker (similar to 2 nm) amorphous SiO2 has been produced. The insulating nature of the thick amorphous SiO2 is verified by transport measurements. The device-quality of the corresponding graphene was confirmed by the observation of Shubnikov-de Haas oscillations, an integer quantum Hall effect, and a weak antilocalization effect within in situ fabricated Hall bar devices. This work provides a reliable platform for applications of large-scale, high-quality graphene in electronics.