• 文献标题:   Etch and Print: Graphene-Based Diodes for Silicon Technology
  • 文献类型:   Article
  • 作  者:   GRILLO A, PENG ZX, PELELLA A, DI BARTOLOMEO A, CASIRAGHI C
  • 作者关键词:   inkjet printing, schottky diode, graphenesilicon junction, photodiode, backendofline proces
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851 EI 1936-086X
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1021/acsnano.2c10684 EA DEC 2022
  • 出版年:   2023

▎ 摘  要

The graphene-silicon junction is one of the simplest conceivable interfaces in graphene-integrated semiconductor technology that can lead to the development of future generation of electronic and optoelectronic devices. However, graphene's integration is currently expensive and time-consuming and shows several challenges in terms of largescale device fabrication, effectively preventing the possibility of implementing this technology into industrial processes. Here, we show a simple and cost-effective fabrication technique, based on inkjet printing, for the realization of printed graphene- silicon rectifying devices. The printed graphene-silicon diodes show an ON/OFF ratio higher than 3 orders of magnitude and a significant photovoltaic effect, resulting in a fill factor of similar to 40% and a photocurrent efficiency of similar to 2%, making the devices suitable for both electronic and optoelectronic applications. Finally, we demonstrate large-area pixeled photodetectors and compatibility with back-end-of-line fabrication processes.